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	1.	Principles of lithography by LevinsonHarry J Series: ; \| Press monograph ; 198. Edition: 3rd ed. Material type: Book Current publication frequency: . Publication details: Bellingham SPIE Press c2010 Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.381531 LEV. Place hold Request article Add to cart (remove)
	2.	Fundmanetal principles of optical lithography: the science of microfabrication by Chris Mack by Mack, Chis Series: ; Edition: Material type: Book; Format: print ; Literary form: Not fiction Current publication frequency: . Publication details: Hoboken Wiley 2007 Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.381531 MAC. Place hold Request article Add to cart (remove)
	3.	Computational lithography by Ma, Xu Series: ; \| Wiley series in pure and applied optics Edition: Material type: Book; Literary form: Not fiction Current publication frequency: . Publication details: New York Wiley c2010 Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.381531 MAX. Place hold Request article Add to cart (remove)
	4.	Optical lithography : here is why by Lin, Burn J Series: ; Edition: Material type: Book Current publication frequency: . Publication details: Bellingham: SPIE Press, c2009 Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.381531 LIN. Place hold Request article Add to cart (remove)
	5.	Microlithography: science and technology by Suzuki, Kazuaki Smith, Bruce W Series: Optical Science and Engineering Edition: 2nd ed. Material type: Book Publication details: Boca Raton: CRC Press, .2007 Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.381531 SUZ. Place hold Request article Add to cart (remove)
	6.	Optical imaging in projection microlithography Alfred Kwok-Kit Wong by Wong, Alfred Kwok-Kit Series: ; Edition: Material type: Book; Format: print ; Literary form: Not fiction Current publication frequency: . Publication details: Bellingham SPIE Press 2005 Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.381531 WON. Place hold Request article Add to cart (remove)
	7.	Resolution enhancement techniques in optical lithography Alfred Kwok-Kit Wong by Wong, Alfred Kwok-Kit Series: ; Edition: Material type: Book; Format: print ; Literary form: Not fiction Current publication frequency: . Publication details: Bellingham SPIE Press 2001 Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.381531 WON. Place hold Request article Add to cart (remove)
	8.	Selected papers on resolution enhancement techniques in optical lithography by Schellenberg, F. M. (Ed.) Series: SPIE milestone series ; v. MS 178. Material type: Book; Format: print ; Literary form: Not fiction Publication details: Bellingham: SPIE Press, 2004 Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.381531 SCH. Place hold Request article Add to cart (remove)
	9.	Fundamental principles of optical lithography: the science of microfabrication by Mack, Chris Publication details: West Sussex: John Wiley and Sons, 2008 Availability: Not available: IIT Gandhinagar: Checked out (1). Place hold Request article Add to cart (remove)

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