Resolution enhancement techniques in optical lithography Alfred Kwok-Kit Wong

By:

Material type: Book

BookSeries: ; Current publication frequency: .Publication details: Bellingham SPIE Press 2001Edition: Description: xvii, 214 p. : ill; 26 cmISBN:

Subject(s):

DDC classification:

LOC classification:

Tags from this library: No tags from this library for this title. Log in to add tags.

Average rating: 0.0 (0 votes)

Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	IIT Gandhinagar	General	621.381531 WON (Browse shelf(Opens below))	Available		013549

Includes bibliographical references and index

There are no comments on this title.

to post a comment.