Fundmanetal principles of optical lithography: the science of microfabrication by Chris Mack

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Material type: Book

BookSeries: ; Current publication frequency: .Publication details: Hoboken Wiley 2007Edition: Description: xvii, 515 p.: ill; 25cmISBN:

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Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	IIT Gandhinagar	General	621.381531 MAC (Browse shelf(Opens below))	Available		011589

Includes bibliographical references and index.

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