Optical imaging in projection microlithography Alfred Kwok-Kit Wong

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Material type: Book

BookSeries: ; Current publication frequency: .Publication details: Bellingham SPIE Press 2005Edition: Description: xix, 254 p.: ill; 26 cmISBN:

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Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	IIT Gandhinagar	General	621.381531 WON (Browse shelf(Opens below))	Available		013548

Includes bibliographical references and index

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