Modeling and optimization techniques for efficient lithography simulation
Material type: BookPublication details: Gandhinagar : Indian Institute of Technology Gandhinagar, 2019Description: xix, 142p. : ill. ; 30 cmSubject(s): DDC classification:- 621.3 KUM
Item type | Current library | Call number | Status | Date due | Barcode |
---|---|---|---|---|---|
Theses | IIT Gandhinagar | 621.3 KUM (Browse shelf(Opens below)) | Available | T00507 |
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