Modeling and optimization techniques for efficient lithography simulation (Record no. 51322)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00741nam a22002297a 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 190821b ||||| |||| 00| 0 eng d |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3 |
| Item number | KUM |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Kumar, Pardeep |
| 245 ## - TITLE STATEMENT | |
| Title | Modeling and optimization techniques for efficient lithography simulation |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Gandhinagar : |
| Name of publisher, distributor, etc | Indian Institute of Technology Gandhinagar, |
| Date of publication, distribution, etc | 2019 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xix, 142p. : |
| Other physical details | ill. ; |
| Dimensions | 30 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | Including bibliography details |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | 12310006 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Ph.D |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Electrical Engineering |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Principal Component Analysis |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Discrete Cosine Transform |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Optical Proximity Correction |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Lithography Simulation |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Srinivasan, Babji |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Item type | Theses |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dewey Decimal Classification | IIT Gandhinagar | IIT Gandhinagar | 21/08/2019 | 621.3 KUM | T00507 | 21/08/2019 | Theses |
