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Modeling and optimization techniques for efficient lithography simulation

Kumar, Pardeep

Modeling and optimization techniques for efficient lithography simulation - Gandhinagar : Indian Institute of Technology Gandhinagar, 2019 - xix, 142p. : ill. ; 30 cm.

Including bibliography details

Subjects--Topical Terms:
12310006
Ph.D
Electrical Engineering
Principal Component Analysis
Discrete Cosine Transform
Optical Proximity Correction
Lithography Simulation

Dewey Class. No.: 621.3 / KUM

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