Refine your search
Availability
-
Authors
- Agaian, S. S... [et ... (1)
- Brainard, Robert L. (1)
- Collett, Edward (1)
- LevinsonHarry J. (1)
- Lin, Burn J. (1)
- Neumann ,Wilfried (1)
- Okoroanyanwu, Uzodin... (1)
- Sasiela, Richard J. (1)
- Schellenberg, F. M. ... (1)
- Society of Photo-opt... (2)
- Voelz, David G. (1)
- Wei, Yayi (1)
- Wong, Alfred Kwok-Ki... (2)
- Xiao, Hong (1)
- Show more
- Show less
-
Item types
- Books (12)
-
Series
-
Topics
- Applied physics (2)
- Chemistry, Technical (1)
- Design and construct... (1)
- Etching (1)
- Integrated circuits (1)
- Lithography (1)
- Microlithography (1)
- Photolithography (1)
- Semiconductors (1)
- Show more
- Show less