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1.
Fundmanetal principles of optical lithography: the science of microfabrication by Chris Mack by
  • Mack, Chis
Series: ;
Edition:
Material type: Text Book; Format: print ; Literary form: Not fiction
Current publication frequency: .
Publication details: Hoboken Wiley 2007
Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.381531 MAC.

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2.
Microlithography: science and technology by
  • Suzuki, Kazuaki
  • Smith, Bruce W
Series: Optical Science and Engineering
Edition: 2nd ed.
Material type: Text Book
Publication details: Boca Raton: CRC Press, .2007
Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.381531 SUZ.

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3.
Fundamental principles of optical lithography: the science of microfabrication by
  • Mack, Chris
Publication details: West Sussex: John Wiley and Sons, 2008
Availability: Not available: IIT Gandhinagar: Checked out (1).

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