Run-to-run control in semiconductor manufacturing
Publication details: Boca Raton: CRC Press, 2001.Description: xiii, 348p.: ill.; hbk.: 23cmISBN:- 9780849311789
- 621.38152 MOY
Item type | Current library | Collection | Call number | Copy number | Status | Date due | Barcode |
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IIT Gandhinagar | General | 621.38152 MOY (Browse shelf(Opens below)) | 1 | Available | 034128 |
Includes List of Acronyms and Index
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
https://www.routledge.com/Run-to-Run-Control-in-Semiconductor-Manufacturing/Moyne-delCastillo-Hurwitz/p/book/9780849311789
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