MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01578 a2200253 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
240328b |||||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780849311789 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 MOY |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Moyne, James (Ed.) |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Run-to-run control in semiconductor manufacturing |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc |
Boca Raton: |
| Name of publisher, distributor, etc |
CRC Press, |
| Date of publication, distribution, etc |
2001. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xiii, 348p.: |
| Other physical details |
ill.; hbk.: |
| Dimensions |
23cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes List of Acronyms and Index |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc |
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.<br/><br/>https://www.routledge.com/Run-to-Run-Control-in-Semiconductor-Manufacturing/Moyne-delCastillo-Hurwitz/p/book/9780849311789 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Run-top-Run Control |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Semiconductor Manufacturing Process Control |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Neural Network Algorithms |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Generic Cell Controller |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Linear Approximation Algorithms |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Chemical-Mechanical Planarization |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Castillo, Enrique del |
| Relator term |
Co-editor |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Hurwitz, Arnon M. |
| Relator term |
Co-editor |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Item type |
Books |
| Source of classification or shelving scheme |
Dewey Decimal Classification |
