Measurement technology for micro-nanometer devices

Contributor(s):

Material type:

TextPublication details: Wiley, 2024.ISBN:

9781118717981

Subject(s):

DDC classification:

621.38152 ZHA Zhang, Wendong

Online resources:

Click here to access e-book

Summary: Fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

List(s) this item appears in: IEEE-Wiley Semiconductor Ebooks

Tags from this library: No tags from this library for this title. Log in to add tags.

Average rating: 0.0 (0 votes)

Holdings
Item type	Current library	Call number	Materials specified	URL	Status
E- Books	IIT Gandhinagar	621.38152 ZHA (Browse shelf(Opens below))	IEEE-Wiley Semiconductor Ebooks	Link to resource	Available

Fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices

There are no comments on this title.

to post a comment.