Measurement technology for micro-nanometer devices
Measurement technology for micro-nanometer devices
- Wiley, 2024.
Fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
9781118717981
Circuits
Devices
Engineered Materials
Dielectrics
Plasmas
IEEE-Wiley Semiconductor Ebooks
621.38152 ZHA / Zhang, Wendong
Fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
9781118717981
Circuits
Devices
Engineered Materials
Dielectrics
Plasmas
IEEE-Wiley Semiconductor Ebooks
621.38152 ZHA / Zhang, Wendong
