Measurement technology for micro-nanometer devices

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TextPublication details: Wiley, 2024.ISBN:

9781118717981

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621.38152 ZHA Zhang, Wendong

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Summary: Fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

List(s) this item appears in: IEEE-Wiley Semiconductor Ebooks

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Item type	Current library	Call number	Materials specified	URL	Status
E- Books	IIT Gandhinagar	621.38152 ZHA (Browse shelf(Opens below))	IEEE-Wiley Semiconductor Ebooks	Link to resource	Available

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Fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices

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