Run-to-run control in semiconductor manufacturing

By:

Moyne, James (Ed.)

Contributor(s):

Publication details: Boca Raton: CRC Press, 2001.Description: xiii, 348p.: ill.; hbk.: 23cmISBN:

9780849311789

Subject(s):

DDC classification:

621.38152 MOY

Summary: Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control. https://www.routledge.com/Run-to-Run-Control-in-Semiconductor-Manufacturing/Moyne-delCastillo-Hurwitz/p/book/9780849311789

Tags from this library: No tags from this library for this title. Log in to add tags.

Average rating: 0.0 (0 votes)

Holdings
Item type	Current library	Collection	Call number	Copy number	Status	Date due	Barcode
Books	IIT Gandhinagar	General	621.38152 MOY (Browse shelf(Opens below))	1	Available		034128

Browsing IIT Gandhinagar shelves, Collection: General Close shelf browser (Hides shelf browser)

Previous								Next
Previous	621.38152 LUN Fundamentals of carrier transport	621.38152 MAT Ionizing radiation effects in MOS devices and circuits	621.38152 MAY Fundamentals of semiconductor fabrication	621.38152 MOY Run-to-run control in semiconductor manufacturing	621.38152 SMI Thin-film deposition : principles and practice	621.38152 STR Solid state electronic devices	621.38152 STR Solid state electronic devices	Next

Includes List of Acronyms and Index

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

https://www.routledge.com/Run-to-Run-Control-in-Semiconductor-Manufacturing/Moyne-delCastillo-Hurwitz/p/book/9780849311789

There are no comments on this title.

to post a comment.