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Optical imaging in projection microlithography

Wong, Alfred Kwok-Kit,

Optical imaging in projection microlithography Alfred Kwok-Kit Wong - - Bellingham SPIE Press 2005 - xix, 254 p.: ill; 26 cm. - - .

Includes bibliographical references and index

ISBN: 9780819458292 =

Nat. Bib. No.:

Nat. Bib. Agency Control No.:

Subjects--Meeting Names:

Subjects--Index Terms: Applied physics Microlithography. Imaging systems

LC Class. No.: /

Dewey Class. No.: 621.381531 WON

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