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Computational lithography

By: Material type: BookBookSeries: ; | Wiley series in pure and applied opticsCurrent publication frequency: .Publication details: New York Wiley c2010. Edition: Description: xv, 226 p.: ill; 25cmISBN:
  • 9780470596975
Subject(s): DDC classification:
  • 621.381531 MAX
LOC classification:
  •  
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Includes bibliographical references and index.

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