Computational lithography
Ma, Xu,
Computational lithography - - New York Wiley c2010. - xv, 226 p.: ill; 25cm. - - . - Wiley series in pure and applied optics. .
Includes bibliographical references and index.
9780470596975 =
Applied physics Microlithography -- Mathematics. Integrated circuits -- Design and construction -- Mathematics. Photolithography -- Mathematics. Semiconductors -- Etching -- Mathematics. Resolution (Optics)
/
621.381531 MAX
Computational lithography - - New York Wiley c2010. - xv, 226 p.: ill; 25cm. - - . - Wiley series in pure and applied optics. .
Includes bibliographical references and index.
9780470596975 =
Applied physics Microlithography -- Mathematics. Integrated circuits -- Design and construction -- Mathematics. Photolithography -- Mathematics. Semiconductors -- Etching -- Mathematics. Resolution (Optics)
/
621.381531 MAX