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Fundmanetal principles of optical lithography: the science of microfabrication

Mack, Chis,

Fundmanetal principles of optical lithography: the science of microfabrication by Chris Mack - - Hoboken Wiley 2007 - xvii, 515 p.: ill; 25cm. - - .

Includes bibliographical references and index.

ISBN: 9780470727300 =

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Subjects--Meeting Names:

Subjects--Index Terms: Applied physics Integrated circuits -- Design and construction. Microlithography -- Industrial applications.

LC Class. No.: /

Dewey Class. No.: 621.381531 MAC

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