Fundamentals of microfabrication and nanotechnology: v.2 manufacturing techniques for microfabrication and nanotechnology by Marc J.Madou

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BookSeries: ; Current publication frequency: .Publication details: London: CRC, c2012. .Edition: 3rd edDescription: 3v.: ill. (some col.) ; 29cmISBN:

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Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	IIT Gandhinagar General Stacks	General	621.38152 MAD (Browse shelf(Opens below))	Available		009107


	515 LIE Analysis	621.38152 MAD Fundamentals of microfabrication and nanotechnology: v.1 Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology	621.38152 MAD Fundamentals of microfabrication and nanotechnology: v.2 manufacturing techniques for microfabrication and nanotechnology	621.38152 MAD Fundamentals of microfabrication and nanotechnology: v.3 from MEMS ti Bio-MEMS and Bio NEMS

Includes bibliographical references and index.

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