Fundamentals of microfabrication and nanotechnology: v.2 manufacturing techniques for microfabrication and nanotechnology
Madou, Marc J. .,
Fundamentals of microfabrication and nanotechnology: v.2 manufacturing techniques for microfabrication and nanotechnology by Marc J.Madou - 3rd ed. - London: CRC, c2012. . - 3v.: ill. (some col.) ; 29cm. - - .
Includes bibliographical references and index.
9781420055191 =
Applied physics Integrated circuits -- Design and construction. Microelectromechanical systems -- Design and construction. Lasers -- Industrial applications. Nanostructured materials -- Design and construction.
/
621.38152 MAD
Fundamentals of microfabrication and nanotechnology: v.2 manufacturing techniques for microfabrication and nanotechnology by Marc J.Madou - 3rd ed. - London: CRC, c2012. . - 3v.: ill. (some col.) ; 29cm. - - .
Includes bibliographical references and index.
9781420055191 =
Applied physics Integrated circuits -- Design and construction. Microelectromechanical systems -- Design and construction. Lasers -- Industrial applications. Nanostructured materials -- Design and construction.
/
621.38152 MAD
