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Introduction to microelectromechanical systems engineering Nadim Maluf, Kirt Williams

By: Contributor(s): Material type: BookBookSeries: ; | Microelectromechanical systems seriesCurrent publication frequency: .Publication details: Boston: Artech House, 2004. .Edition: 2nd edDescription: xx, 283 p. : ill; 26cmISBN:
  • 9781580535908
Subject(s): DDC classification:
  • 621.381 MAL
LOC classification:
  •  
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Includes bibliographical references and index.

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