Introduction to microelectromechanical systems engineering
Maluf, Nadim.,
Introduction to microelectromechanical systems engineering Nadim Maluf, Kirt Williams - 2nd ed. - Boston: Artech House, 2004. . - xx, 283 p. : ill; 26cm. - - . - Microelectromechanical systems series. .
Includes bibliographical references and index.
9781580535908 =
Applied physics Microelectromechanical systems.
/
621.381 MAL
Introduction to microelectromechanical systems engineering Nadim Maluf, Kirt Williams - 2nd ed. - Boston: Artech House, 2004. . - xx, 283 p. : ill; 26cm. - - . - Microelectromechanical systems series. .
Includes bibliographical references and index.
9781580535908 =
Applied physics Microelectromechanical systems.
/
621.381 MAL