Introduction to semiconductor manufacturing technology, 2nd ed. (Record no. 40587)
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| 000 -LEADER | |
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| fixed length control field | 00964nam a2200385 454500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 160319b2012. xxu||||| |||| 00| 0 eng d |
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| 016 ## - NATIONAL BIBLIOGRAPHIC AGENCY CONTROL NUMBER | |
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| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780819490926 |
| 040 ## - CATALOGING SOURCE | |
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| 041 ## - LANGUAGE CODE | |
| Language code of text/sound track or separate title | eng |
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| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 XIA |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Xiao, Hong, |
| 222 ## - KEY TITLE | |
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| 245 ## - TITLE STATEMENT | |
| Title | Introduction to semiconductor manufacturing technology, 2nd ed. |
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| Statement of responsibility, etc. | by Hong Xiao |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| Remainder of edition statement | |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Linkage | |
| Place of publication, distribution, etc. | Bellingham: |
| Name of publisher, distributor, etc. | SPIE Press, |
| Date of publication, distribution, etc. | 2012. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 664 p.: |
| Other physical details | ill.; |
| Dimensions | 26 cm. |
| 310 ## - CURRENT PUBLICATION FREQUENCY | |
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| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE | |
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| 500 ## - GENERAL NOTE | |
| Materials specified | |
| General note | Includes bibliographical references and index |
| 611 ## - SUBJECT ADDED ENTRY--MEETING NAME | |
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| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Applied physics |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Semiconductor industry |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Manufacturing technology |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Integrated circuits |
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| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Total Checkouts | Full call number | Barcode | Checked out | Date last seen | Date last checked out | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| IIT Gandhinagar | IIT Gandhinagar | 21/01/2015 | Himanshu Book Co. | 8210.85 | 3 | 621.38152 XIA | 020079 | 02/08/2024 | 15/06/2024 | 15/06/2024 | 02/02/2016 | Books |
