Introduction to semiconductor manufacturing technology, 2nd ed.

Xiao, Hong,

Introduction to semiconductor manufacturing technology, 2nd ed. by Hong Xiao - 2nd ed. - Bellingham: SPIE Press, 2012. - 664 p.: ill.; 26 cm. - - .

Includes bibliographical references and index

9780819490926 =








Applied physics Semiconductor industry Manufacturing technology Integrated circuits

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621.38152 XIA


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