000 01081nam a2200229 4500
020 _a9781119177982
082 _a621.38152 DUR
100 _aDuraffourg, Laurent
245 _aNanoelectromechanical systems
260 _bWiley,
_c2024.
520 _aThis book will present the theoretical and technological elements of nanosystems. Among the different topics discussed, the authors include the electromechanical properties of NEMS, the scaling effects that give these their interesting properties for different applications and the current manufacturing processes. The authors aim to provide useful tools for future readers and will provide an accurate picture of current and future research in the field.
650 _aCircuits
650 _aDevices
650 _aComputing
650 _aIEEE-Wiley Semiconductor Ebooks
650 _aEngineered Material
650 _aDielectrics
650 _aPlasmas
700 _aArcamone, Julien
_eCo author
856 _uhttps://ieeexplore.ieee.org/servlet/opac?bknumber=10518236
_yClick here to access e-book
942 _2ddc
_cE
999 _c63151
_d63151