| 000 | 01081nam a2200229 4500 | ||
|---|---|---|---|
| 020 | _a9781119177982 | ||
| 082 | _a621.38152 DUR | ||
| 100 | _aDuraffourg, Laurent | ||
| 245 | _aNanoelectromechanical systems | ||
| 260 |
_bWiley, _c2024. |
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| 520 | _aThis book will present the theoretical and technological elements of nanosystems. Among the different topics discussed, the authors include the electromechanical properties of NEMS, the scaling effects that give these their interesting properties for different applications and the current manufacturing processes. The authors aim to provide useful tools for future readers and will provide an accurate picture of current and future research in the field. | ||
| 650 | _aCircuits | ||
| 650 | _aDevices | ||
| 650 | _aComputing | ||
| 650 | _aIEEE-Wiley Semiconductor Ebooks | ||
| 650 | _aEngineered Material | ||
| 650 | _aDielectrics | ||
| 650 | _aPlasmas | ||
| 700 |
_aArcamone, Julien _eCo author |
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| 856 |
_uhttps://ieeexplore.ieee.org/servlet/opac?bknumber=10518236 _yClick here to access e-book |
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| 942 |
_2ddc _cE |
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| 999 |
_c63151 _d63151 |
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