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| 008 | 160319b2012. xxu||||| |||| 00| 0 eng d | ||
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| 041 | _aeng | ||
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| 082 | _a621.38152 XIA | ||
| 100 | _aXiao, Hong, | ||
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_a _b |
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_aIntroduction to semiconductor manufacturing technology, 2nd ed. _b _cby Hong Xiao |
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| 250 |
_a2nd ed. _b |
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_6 _aBellingham: _bSPIE Press, _c2012. |
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_a 664 p.: _bill.; _c26 cm. |
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_a _b |
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| 440 |
_a _v |
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_3 _aIncludes bibliographical references and index |
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| 611 |
_a _c |
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| 653 | _aApplied physics | ||
| 653 | _aSemiconductor industry | ||
| 653 | _aManufacturing technology | ||
| 653 | _aIntegrated circuits | ||
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