000			00725nam a2200241 454500
008			160319b1989 xxu||||| |||| 00| 0 eng d
020			_a9780841214750
082			_a621.381 HES
100			_aHess, Dennis W.,
245			_aMicroelectronics processing: chemical engineering aspects
260			_aWashington, DC: _bAmerican Chemical Society, _c1989.
300			_axiv, 547 p: _bill; _c24 cm.
490			_aAdvances in chemistry series, _v221.
500			_aIncludes index.
650			_aApplied physics
650			_aMicroelectronics
650			_aIntegrated circuits
650			_aSurface chemistry
650			_aMaterials
650			_aDesign and construction
700			_aJensen, Klavs F,
942			_2ddc _cTD
999			_c32771 _d32771