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| 008 | 160319b2010. xxu||||| |||| 00| 0 eng d | ||
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| 082 | _a621.381 FRA | ||
| 100 | _aFranssila, Sami. ., | ||
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_aIntroduction to microfabrication _b _cby Sami Franssila |
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| 250 |
_a2nd ed. . _b |
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_6 _aHoboken, NJ : _bJohn Wiley & Sons, _c2010. |
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_axiv, 518 p. : _bill; _c26cm. |
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_a _b |
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_3 _aIncludes bibliographical references and index. |
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_a _c |
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| 653 | _aApplied physics | ||
| 653 | _aMicroelectromechanical systems. | ||
| 653 | _aElectronic apparatus and appliances. | ||
| 653 | _aMicrofabrication. | ||
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