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| 008 | 160319bc1995. . xxu||||| |||| 00| 0 eng d | ||
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| 020 | _a9780070585027 | ||
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| 041 | _aeng | ||
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| 082 | _a621.38152 SMI | ||
| 100 | _aSmith, Donald L. ., | ||
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_aThin-film deposition : principles and practice _b _cby Donald L. Smith |
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_6 _aNew York: _bMcGraw-Hill, , _cc1995. . |
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_axxiii, 616 p.: _bill; _c24cm. |
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_3 _aIncludes bibliographical references and index. |
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| 653 | _aApplied physics | ||
| 653 | _aThin films. | ||
| 653 | _aVapor-plating. | ||
| 653 | _aThin film devices. | ||
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