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| 008 | 160319bc2012. . xxu||||| |||| 00| 0 eng d | ||
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| 020 | _a9781420055160 | ||
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| 082 | _a621.38152 MAD | ||
| 100 | _aMadou, Marc J. ., | ||
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_aFundamentals of microfabrication and nanotechnology: v.3 from MEMS ti Bio-MEMS and Bio NEMS _b _cby Marc J.Madou |
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| 250 |
_a3rd ed. _b |
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_6 _aNew York: _bCRC, , _cc2012. . |
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_a3v.: _bill. (some col.) ; _c29cm. |
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| 310 |
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_3 _aIncludes bibliographical references and index. |
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| 611 |
_a _c |
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| 653 | _aApplied physics | ||
| 653 | _aIntegrated circuits -- Design and construction. | ||
| 653 | _aMicroelectromechanical systems -- Design and construction. | ||
| 653 | _aNanostructured materials -- Design and construction. | ||
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