| 000 | 01089nam a2200385 454500 | ||
|---|---|---|---|
| 008 | 160319b 2011. . xxu||||| |||| 00| 0 eng d | ||
| 015 |
_2 _a |
||
| 016 |
_2 _a |
||
| 020 | _a9781420055115 | ||
| 040 |
_a _c _d |
||
| 050 |
_a _b |
||
| 082 | _a621.38152 MAD | ||
| 100 | _aMadou, Marc J. ., | ||
| 222 |
_a _b |
||
| 245 |
_aFundamentals of microfabrication and nanotechnology: v.1 Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology _b _cby Marc J.Madou |
||
| 250 |
_a3rd ed. _b |
||
| 260 |
_6 _aNew York: _bTaylor & Francis, _c 2011. . |
||
| 300 |
_av.p.: _bill; _c29cm. |
||
| 310 |
_a _b |
||
| 440 |
_a _v |
||
| 500 |
_3 _aIncludes bibliographical references and index. |
||
| 611 |
_a _c |
||
| 653 | _aApplied physics | ||
| 653 | _aMicroelectromechanical systems. | ||
| 653 | _aNanoelectromechanical systems. | ||
| 653 | _aMicrofluidics. | ||
| 653 | _aSolid state physics. | ||
| 906 |
_a _b _c _d _e _f _g |
||
| 923 |
_a _c |
||
| 925 |
_a _b _x |
||
| 955 |
_d _e _f _g _t |
||
| 963 | _a | ||
| 991 |
_w _t _p _i _h _b |
||
| 999 |
_c28742 _d28742 |
||