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| 008 | 160319b 2004. . xxu||||| |||| 00| 0 eng d | ||
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_2 _a |
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| 020 | _a9781580535908 | ||
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_a _b |
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| 082 | _a621.381 MAL | ||
| 100 | _aMaluf, Nadim., | ||
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_a _b |
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_aIntroduction to microelectromechanical systems engineering _b _cNadim Maluf, Kirt Williams |
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| 250 |
_a2nd ed. _b |
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_6 _aBoston: _bArtech House, _c 2004. . |
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| 300 |
_axx, 283 p. : _bill; _c26cm. |
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_a _b |
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| 440 |
_a _v |
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_6008802 _aMicroelectromechanical systems series. |
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| 500 |
_3 _aIncludes bibliographical references and index. |
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| 611 |
_a _c |
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| 653 | _aApplied physics | ||
| 653 | _aMicroelectromechanical systems. | ||
| 700 | _aWilliams, Kirt. , | ||
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