| 000 | 00560nam a2200181 454500 | ||
|---|---|---|---|
| 008 | 160319b2006. xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780486450285 | ||
| 082 | _a620.11295 TOM | ||
| 100 | _aTompkins, Harland G, | ||
| 245 | _aUsers guide to ellipsometry | ||
| 260 |
_aNew York: _bDover Publications, _c2006. |
||
| 300 |
_axii, 260 p.: _bill; _c22cm. |
||
| 500 | _aIncludes bibliographical references and index. | ||
| 650 | _aEngineering & allied operations | ||
| 650 | _aEllipsometry | ||
| 650 | _aEllipsometry -- Case studies | ||
| 942 |
_2ddc _cTD |
||
| 999 |
_c28491 _d28491 |
||