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| 008 | 160319b2004. xxu||||| |||| 00| 0 eng d | ||
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_2 _a |
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| 020 | _a9783540678212 | ||
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_a _c _d |
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| 082 | _a621.38152 HER | ||
| 100 | _aHerman, Marian A. ., | ||
| 222 |
_a _b |
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| 245 |
_aEpitaxy : physical principles and technical implementation _b _cMarian A. Herman, Wolfgang Richter, Helmut Sitter |
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| 250 |
_a _b |
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| 260 |
_6 _aNew York: _bSpringer, _c2004. |
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| 300 |
_axv, 522 p.: _bill; _c24cm. |
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| 310 |
_a _b |
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| 440 |
_a _v |
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_6008569 _aSpringer series in materials science; _v62. |
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| 500 |
_3 _aIncludes bibliographical references and index. |
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| 611 |
_a _c |
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| 653 | _aApplied physics | ||
| 653 | _aEpitaxy. | ||
| 653 | _aThin films, Multilayered -- Technique. | ||
| 653 | _aEpitaxy. | ||
| 700 | _aSitter, Helmut., | ||
| 700 | _aRichter, Wolfgang, | ||
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_c28358 _d28358 |
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