000			00925nam a2200241 454500
999			_c24691 _d24691
008			160319b2001 xxu||||| |||| 00| 0 eng d
020			_a9788131726044
082			_a621.395 PLU
100			_aPlummer, James D.,
245			_aSilicon VLSI technology : _b fundamentals, practice, and modeling/
260			_aNew Delhi _bPearson Education _c2001
300			_axiv, 817 p.: _bill.; _c25 cm.
440			_aPrentice Hall electronics and VLSI series
490			_aPrentice Hall electronics and VLSI series.
500			_aIncludes bibliographical references and index.
504			_aIncludes bibliographical references and index.
650			_aIntegrated circuits. _xVery large scale integration.
650			_xDesign and construction. _aSilicon.
650			_aSilicon oxide films. _aMetal oxide semiconductors.
700			_aGriffin, Peter B. ,
700			_aDeal, Michael D. ,
942			_2ddc _cTD