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1.
Computational lithography by
  • Ma, Xu
Series: ; | Wiley series in pure and applied optics
Edition:
Material type: Text Book; Literary form: Not fiction
Current publication frequency: .
Publication details: New York Wiley c2010
Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.381531 MAX.

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2.
Optical lithography : here is why by
  • Lin, Burn J
Series: ;
Edition:
Material type: Text Book
Current publication frequency: .
Publication details: Bellingham: SPIE Press, c2009
Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.381531 LIN.

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3.
Nanofabrication: principles to laboratory practice by
  • Sarangan, Andrew
Publication details: London: CRC Press, 2017
Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.381531 SAR.

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