Selected papers on resolution enhancement techniques in optical lithography

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Material type: Book

BookSeries: SPIE milestone series ; v. MS 178.Publication details: Bellingham: SPIE Press, 2004.Description: xx, 875 p.: ill; hbk; 29 cmISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books	IIT Gandhinagar	621.381531 SCH (Browse shelf(Opens below))	Available		013566

Includes bibliographical references and index

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