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1.
Fundamentals of semiconductor manufacturing and process control by Gary S. May and Costas J. Spanos by
  • May, Gary S
  • Spanos, Costas J
Series: ;
Edition:
Material type: Text Book
Current publication frequency: .
Publication details: Hoboken, NJ: Wiley &​ Sons, 2006
Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.38152 MAY.

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2.
Fundamentals of semiconductor fabrication by
  • May, Gary S
  • Simon, M. Sze
Publication details: New Delhi: Wiley India, 2003
Availability: Items available for loan: IIT Gandhinagar (1)Call number: 621.38152 MAY.

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