Principles of lithography

By:

LevinsonHarry J

Material type: Book

BookSeries: ; | Press monograph ; 198.Current publication frequency: .Publication details: Bellingham SPIE Press c2010Edition: 3rd edDescription: xiv, 503 p.: ill. (some col.); 26cmISBN:

9780819483249

Subject(s):

Applied physics
Microlithography
Integrated circuits -- Design and construction

DDC classification:

621.381531 LEV

LOC classification:

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	IIT Gandhinagar	General	621.381531 LEV (Browse shelf(Opens below))	Available		011573

Includes bibliographical references and index.

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