TY  - BOOK
AU  - Duraffourg, Laurent
AU  - Arcamone, Julien
TI  - Nanoelectromechanical systems
SN  - 9781119177982
U1  - 621.38152 DUR 
PY  - 2024///
PB  - Wiley
KW  - Circuits
KW  - Devices
KW  - Computing
KW  - IEEE-Wiley Semiconductor Ebooks
KW  - Engineered Material
KW  - Dielectrics
KW  - Plasmas
N2  - This book will present the theoretical and technological elements of nanosystems. Among the different topics discussed, the authors include the electromechanical properties of NEMS, the scaling effects that give these their interesting properties for different applications and the current manufacturing processes. The authors aim to provide useful tools for future readers and will provide an accurate picture of current and future research in the field
UR  - https://ieeexplore.ieee.org/servlet/opac?bknumber=10518236
ER  -