TY  - BOOK
AU  - Corigliano, Alberto
AU  - Ardito, Raffaele
AU  - Comi, Claudia
AU  - Frangi, Attilio
AU  - Ghisi, Aldo
AU  - Mariani, Stefano
TI  - Mechanics of microsystems
SN  - 9781119053804
U1  - 621.38152 COR 
PY  - 2024///
PB  - Wiley
KW  - Circuits
KW  - Components
KW  - Devices
KW  - IEEE-Wiley Semiconductor Ebooks
N2  - Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry.

Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device.

Key features:

Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues.
Includes examples of applications in industry.
Accompanied by a website hosting supplementary material
UR  - https://ieeexplore.ieee.org/servlet/opac?bknumber=10523067
ER  -