TY  - GEN
AU  - Moyne, James (Ed.)
AU  - Castillo, Enrique del 
AU  - Hurwitz, Arnon M. 
TI  - Run-to-run control in semiconductor manufacturing
SN  - 9780849311789
U1  - 621.38152 MOY 
PY  - 2001///
CY  - Boca Raton
PB  - CRC Press
KW  - Run-top-Run Control
KW  - Semiconductor Manufacturing Process Control
KW  - Neural Network Algorithms
KW  - Generic Cell Controller
KW  - Linear Approximation Algorithms
KW  - Chemical-Mechanical Planarization
N1  - Includes List of Acronyms and Index
N2  - Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

https://www.routledge.com/Run-to-Run-Control-in-Semiconductor-Manufacturing/Moyne-delCastillo-Hurwitz/p/book/9780849311789
ER  -