TY  - BOOK
AU  - Kumar, Pardeep
AU  - Srinivasan, Babji
TI  - Modeling and optimization techniques for efficient lithography simulation 
U1  - 621.3 
PY  - 2019///
CY  - Gandhinagar
PB  - Indian Institute of Technology Gandhinagar, 
KW  - 12310006
KW  - Ph.D
KW  - Electrical Engineering
KW  - Principal Component Analysis
KW  -  Discrete Cosine Transform
KW  - Optical Proximity Correction
KW  - Lithography Simulation
N1  - Including bibliography details
ER  -