Kumar, Pardeep Modeling and optimization techniques for efficient lithography simulation - Gandhinagar : Indian Institute of Technology Gandhinagar, 2019 - xix, 142p. : ill. ; 30 cm. Including bibliography details Subjects--Topical Terms: 12310006Ph.DElectrical EngineeringPrincipal Component Analysis Discrete Cosine Transform Optical Proximity CorrectionLithography Simulation Dewey Class. No.: 621.3 / KUM