TY  - BOOK
AU  - Dawar, Rohit
AU  - Mohapatra, Nihar Ranjan
AU  - Srinivasan, Babji
TI  - Hotspot detection in lithographic patterns using machine learning technique
U1  - 621.763 
PY  - 2018///
CY  - Gandhinagar
PB  - Indian Institute of Technology
KW  - Electrical Engineering
KW  - Hotspot
KW  - Lithographic
KW  - Machine
KW  - Micro Lithography
N1  - Including bibliography details
ER  -