Dawar, Rohit <br/><br/>
Hotspot detection in lithographic patterns using machine learning technique 

 - Gandhinagar :  Indian Institute of Technology,  2018 
 - ix, 69 p. :  ill. ;  30 cm. 
<br/><br/>Including bibliography details 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electrical Engineering<br/>Hotspot<br/>Lithographic<br/>Machine <br/>Micro Lithography
<br/><br/><label>Dewey Class. No.: </label>621.763  / DAW