TY  - BOOK
AU  - Plummer, James D.,
AU  - Griffin, Peter B.,
AU  - Deal, Michael D.,
TI  - Silicon VLSI technology: fundamentals, practice, and modeling 
SN  - 9788131726044
U1  - 621.395 PLU  
PY  - 2009///
CY  - New Delhi
PB  - Pearson Education
KW  - Applied physics
KW  - Silicon-on-insulator technology
KW  - Metal oxide semiconductors
KW  - Silicon oxide films
KW  - Silicon
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
N1  - Includes bibliographical references and index
ER  -