Schellenberg, F. M. (Ed.) <br/><br/>
Selected papers on resolution enhancement techniques in optical lithography 

 - Bellingham:  SPIE Press,  2004. 
 - xx, 875 p.:  ill; hbk;  29 cm. 
 - SPIE milestone series ;  v. MS 178. .
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819451668 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Applied physics<br/>Semiconductors<br/>Integrated circuits<br/>Design and construction<br/>Microlithography<br/>Etching<br/>Photolithography
<br/><br/><label>Dewey Class. No.: </label>621.381531   / SCH