TY  - BOOK
AU  - Wong, Alfred Kwok-Kit.,
TI  - Resolution enhancement techniques in optical lithography
SN  - 9780819439956
U1  - 621.381531 WON 
PY  - 2001///
CY  - Bellingham
PB  - SPIE Press
KW  - Applied physics
KW  - Microlithography
KW  - Design and construction
KW  - Integrated circuits
N1  - Includes bibliographical references and index
ER  -